Thin films of diamond-like carbon (DLC) are (because of their increased specific resistivity) of minor interest for electronic applications. For this reason, PT&B offers doped carbon films, which are prepared by sputter-deposition (PVD). This coating combines excellent tribological properties with the functionality as diffusion barrier and increased conductivity. These films are used, for example, in fuel cells and components of vacuum electronics. The deposition equipment of PT&B permits the deposition of these carbon films onto smooth substrates (wafer) as well as the deposition onto three-dimensional objects.
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