PT&B deposits films for electronic applications by PVD (Sputter-Deposition). Among these are the following coatings:
- highly c-axis oriented (textured) aluminum nitride (AlN) for the use in, e. g. SAW devices
- thin films of gallium oxide (Ga2O3) and gallium nitride (GaN) at substrate temperatures as low as 500 K
- doped carbon coatings, which are useful for example as electronically conductive diffusion barriers
- metallic films of, e. g. Al, Ti, Mo, Ag, Au, W
For the case of interest please send a request to PT&B!
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